Published papers
Makabe, Toshiaki
161-180 items (total 198)
Transport coefficients and scattering cross-sections for plasma modeling in CF4-Ar mixtures: a swarm analysis
- Author
- M. Kurihara, Z. Lj. Petrovic and T. Makabe
- Publication Title
- Magazine name J.Phys.D: Start Page 2146-53 (Publication Date）2001）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With
Two-dimensional modeling of a micro cell plasma in a mixture of Ne/Xe driven by a capacitively coupled high-frequency source
- Author
- M. Kurihara and T. Makabe
- Publication Title
- Magazine name J.Appl.Phys. Start Page 7756-63 (Publication Date）2001）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With
Influence of gas pressure and magnetic field upon dc magnetron discharge”
- Author
- E. Shidoji, K. Ness and T. Makabe
- Publication Title
- Magazine name VACUUM Start Page 299-306 (Publication Date）2001/03）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With
The effect of topographical local charging on the etching of deep-submicron structures in SiO_2_ as a function of aspect ratio"
- Author
- J. Matsui, N. Nakano, Z. Lj. Petrovic, and T. Makabe
- Publication Title
- Magazine name Appl.Phys.Let. Start Page 883-5 (Publication Date）2001/02）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With
Radio-Frequency plasma modeling for low-temperature processing
- Author
- T. Makabe
- Publication Title
- Magazine name Adv.in Atomic, Molecular and Optical Physics Start Page 127-54 (Publication Date）2001/01）
- Authorship Category
- Single Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With
Modeling of radial uniformity at a wafer interface in a 2f-CCP for SiO2 etching
- Author
- T. Yagisawa, T. Shimada, and T. Makabe
- Publication Title
- Magazine name J.Vac.Sci.Technol.B Start Page 2212-17 (Publication Date）2005）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With
Effect of metastables on a sustaining mechanism in inductively coupled plasma in Ar
- Author
- T. Sato and T. Makabe
- Publication Title
- Magazine name J.Appl.Phys. Start Page 113304(3pp) (Publication Date）2005）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With
Three dimensional singular images of low pressure hydrogen-ICP in E-mode
- Author
- Y. Miyoshi, M. Miyauchi, A. Oguni, and T. Makabe
- Publication Title
- Magazine name IEEE Trans. on Plasma Sci. Start Page 362-3 (Publication Date）2005）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With
Transport coefficients for electrons in argon in crossed electric and magnetic rf fields
- Author
- Z. M. Raspopovic, D. Dujko, T. Makabe, and Z. Lj. Petrovic
- Publication Title
- Magazine name Plasma Sources Sci. Technol. Start Page 293-300 (Publication Date）2005）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With
Space- and time-resolved E-H transition in an inductively coupled plasma in Ar
- Author
- S. Hirao, Y. Hayashi, and T. Makabe
- Publication Title
- Magazine name IEEE Trans. Plasma Sci. Start Page 1410-11 (Publication Date）2008）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With
Diagnostics of N2 dissociation in RF plasmas by vacuum ultraviolet emission and absorption spectroscopy
- Author
- T. Kitajima, T. Nakano, S. Samukawa, and T. Makabe
- Publication Title
- Magazine name Plasma Sources Sci. & Technol. Start Page 024018(7pp) (Publication Date）2008）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With
In situ measurement of plasma charging on SiO2 hole bottoms and reduction by negative charge injection during etching
- Author
- T. Ohmori and T. Makabe
- Publication Title
- Magazine name Appl.Surface Science Start Page 3696-709 (Publication Date）2008）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With
A numerical investigation of atomic oxygen density in an inductively coupled plasma in O2/Ar mixture
- Author
- T. Sato and T. Makabe
- Publication Title
- Magazine name J.Phys.D:Appl.Phys. Start Page 035211(6pp) (Publication Date）2008）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With
Guest editorial special issue on modeling and simulation of collisional low-temperature plasmas
- Author
- D. J. Economou and T. Makabe
- Publication Title
- Magazine name IEEE Trans. on Plasma Science Start Page 1194 (Publication Date）2007）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With
Numerical modeling of rf magnetron sputtering with metallic or dielectric target
- Author
- T. Makabe and T. Yagisawa
- Publication Title
- Magazine name Materials Sci. Forum Start Page 165-71 (Publication Date）2007）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With
Data and modeling of negative ion transport in gases of interest for production of integrated circuits and nanotechnologies
- Author
- Z.Lj.Petrovic, Z.M.Raspopovic, V.D.Stojanovic, J.V.Jovanovic, G.Malovic, T.Makabe, and J.de Urquijo
- Publication Title
- Magazine name Appl. Surface Science Start Page 6619-40 (Publication Date）2007）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With
Measurement of amount of pattern trim and surface chemistry for organic resist etching in an inductively coupled plasma in SO2-O2 gas mixtures
- Author
- T. Goto and T. Makabe
- Publication Title
- Magazine name Jpn.J.Appl.Phys. Start Page 5297-303 (Publication Date）2007）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With
Transport coefficients for electrons in mixtures of Ar and HBr
- Author
- O.Sasic, S.Dujko, Z.Lj.Petrovic, and T.Makabe
- Publication Title
- Magazine name Jpn.J.Appl.Phys. Start Page 3560-5 (Publication Date）2007）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With
Effects of plasma modeling on feature profile of silicon micro-electro-mechanical systems through flux ion velocity distributions in two-frequency cpapcitively coupled plasma in SF6/O2
- Author
- F. Hamaoka, T. Yagisawa, and T. Makabe
- Publication Title
- Magazine name Jpn.J.Appl.Phys. Start Page 3059-65 (Publication Date）2007）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With
Modeling of Si etchig under effects of plasma molding in two-frequency capacitively coupled plasma in SF6/O2 for MEMS fabrication
- Author
- F.Hamaoka, T.Yagisawa, and T.Makabe
- Publication Title
- Magazine name IEEE Trans. on Plasma Sci. Start Page 1350-8 (Publication Date）2007/10）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With