Published papers
Makabe, Toshiaki
81-100 items (total 198)
Modeling of an RF glow discharge plasma
- Author
- K. Okazaki, T.Makabe, and Y. Yamaguchi
- Publication Title
- Magazine name Appl. Phys. Lett. Start Page 1742-4 (Publication Date）1989）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With
A modeling of amorphous silicon deposition in silane dc-glow dicharges
- Author
- Y. Yamaguchi, A. Sumiyama, R. Hattori, Y. Morokuma, and T.Makabe
- Publication Title
- Magazine name J. Phys. D Start Page 505-11 (Publication Date）1989）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With
Electoron transport to a substrate in a radio frequency capacitively coupled plasma by the Boltzmann equation
- Author
- J. Matsui, M. Shibata, N. Nakano, and T.Makabe
- Publication Title
- Magazine name J.Vac.Sci.Technol.A Start Page 294-9 (Publication Date）1998）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With
Time resolved optical emission spectroscopy of an inductively coupled plasma in argon and oxygen
- Author
- M. Tadokoro, H. Hirata, N. Nakano, Z. Lj. Petrovic, and T.Makabe
- Publication Title
- Magazine name Phys.Rev.E Start Page R43-6 (Publication Date）1998）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With
Charged particle transport in harmonically varying electric fields:Foundations and Phenomenology
- Author
- R.E.Robson and T.Makabe
- Publication Title
- Magazine name Annals of Physics Start Page 74-113 (Publication Date）1997）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With
Three dimensional optical emission tomography of an inductively coupled plasma
- Author
- A.Okigawa, M.Tadokoro, A.Itoh, N.Nakano, Z.Lj.Ptorovic, and T.Makabe
- Publication Title
- Magazine name Jpn. J. Appl. Phys. Start Page 3707-3713 (Publication Date）1997）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With
Two dimensional transport of submicron particles in CCP reactor
- Author
- R. Hashido, M. Hasebe, Y. Hosokawa, N. Nakano, Y. Yamaguchi, and T.Makabe
- Publication Title
- Magazine name Jpn. J. Appl. Phys. Start Page 3707-13 (Publication Date）1997）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With
Diffusion tensor in electron transport in gases in a radio-frequency field
- Author
- K.Maeda，T.Makabe，N.Nakano，S.Bzenic，and Z.Lj.Petrovic
- Publication Title
- Magazine name Phys. Rev. E Start Page 5901-08 (Publication Date）1997）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With
The time resolved two-dimensional profile of a radiofrequency capacitively coupled plasma
- Author
- T.Kitajima，M.Izawa，N.Nakano，and T.Makabe
- Publication Title
- Magazine name J. Phys. D Start Page 1783-9 (Publication Date）1997）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With
Comparative study of the characteristics between CCP and ICP by 2D-modeling / diagnostics
- Author
- T. Makabe and N. Nakano
- Publication Title
- Magazine name Elec.Chem.Soc.Proc. Start Page 1-10 (Publication Date）1996）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With
Modeling of negative ion plasma (in Japanese)
- Author
- T.Makabe
- Publication Title
- Magazine name J.Plasma & Fusion Reseach Start Page 1138-43 (Publication Date）1996）
- Authorship Category
- Single Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With
Robot assisted optical emission tomography in a CCP and ICP
- Author
- T.Makabe
- Publication Title
- Magazine name Physics of Ionized Gases Start Page 257-68 (Publication Date）1996）
- Authorship Category
- Single Work
- Publication Category
- Research paper (international conference proceedings)
- Peer-review Status
- With
Modeling of narrow gap reactive ion etcher by the relaxation continuum model
- Author
- N. Nakano and T. Makabe
- Publication Title
- Magazine name Physics of Ionized Gases Start Page 269-78 (Publication Date）1996）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With
Effect of O2(a^1Δg) on plasma structure in oxygen rf discharges
- Author
- M. Shibata, N. Nakano and T. Makabe
- Publication Title
- Magazine name J. Appl. Phys. Start Page 6142-7 (Publication Date）1996）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With
Diagnostics of a non-equilibrium inductively coupled plasmas in argon
- Author
- A. Okigawa, Z. Petrovic, M. Tadokoro, T. Makabe, N. Nakano, and A. Itoh
- Publication Title
- Magazine name Appl. Phys. Lett. Start Page 2644-6 (Publication Date）1996）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With
Computer-assisted optical emission tomography in a radiofrequency capacitively coupled plasma
- Author
- K.Kitajima，M.Izawa，R.Hashido，N.Nakano，and T.Makabe
- Publication Title
- Magazine name Appl. Phys. Lett. Start Page 758-60 (Publication Date）1996）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With
Robot assisted opotical emission tomography in an inductively coupled plasma reactor
- Author
- A.Okigawa，T.Makabe，T.Shibagaki，N.Nakano， Z.Lj.Petrovic，T.Kogawa，and A.Itoh
- Publication Title
- Magazine name Jpn.J.Appl.Phys. Start Page 1890-3 (Publication Date）1996）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With
Tomographic images of a plasma structure and sputtered particle in a DC magnetron discharge
- Author
- A.Itoh，T.Makabe， N.Shimura，and S.Tougo
- Publication Title
- Magazine name IEEE Trans. on Plasma Sci. Start Page 109-10 (Publication Date）1996）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With
Effect of surface material on spatio-temporal structure in O2 RF glow discharge
- Author
- M.Shibata，T.Makabe，and N.Nakano
- Publication Title
- Magazine name Jpn.J.Appl.Phys. Start Page 6230-6 (Publication Date）1995）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With
Low temperature SF6 plasma and related semiconductor processings (in Japanese)
- Author
- T.Makabe
- Publication Title
- Magazine name IEE of Jpn. Start Page 492-4 (Publication Date）1995）
- Authorship Category
- Single Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With