Published papers
Makabe, Toshiaki
181-198 items (total 198)
Optical emission diagnostics of etching of low-k dielectrics in a two frequency inductively coupled plasma
- Author
- M. Miyauchi, Y. Miyoshi, Zoran Lj. Petrovic, and T. Makabe
- Publication Title
- Magazine name Solid-State Electonics Start Page 1418-24 (Publication Date）2007/09）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With
Plasma etching and feature evolution of organic low-k material by using VicAdress
- Author
- T.Makabe, T.Shimada, and T.Yagisawa
- Publication Title
- Magazine name Computer Physics Communications Start Page 64-7 (Publication Date）2007/02）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With
Evaluation of errors in feedback control based on persistence prediction in model-vased process controller system for deep sub-100nm gate fabrication
- Author
- T. Goto and T. Makabe
- Publication Title
- Magazine name Jpn.J.Appl.Phys. Start Page 7645-54 (Publication Date）2006）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With
Optical diagnostics for plasma-surface interaction in CF4/Ar radio-frequency inductively coupled plasma during Si and SiO2 etching
- Author
- Y. Miyoshi, M. Miyauchi, Y. Komukai, and T. Makabe
- Publication Title
- Magazine name J.Vac.Sci.Technol.A Start Page 1718-24 (Publication Date）2006）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With
Increased O(1D) metastable density in highly Ar-diluted oxygen plasmas
- Author
- T. Kitajima, T. Nakano, and T. Makabe
- Publication Title
- Magazine name Appl.Phys.Lett. Start Page 091501(3pp) (Publication Date）2006）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With
A modeling of DC magnetron plasma for sputtering: transport of sputtered copper atoms
- Author
- T. Yagisawa and T. Makabe
- Publication Title
- Magazine name J.Vac,Sci.Technol.A Start Page 908-13 (Publication Date）2006）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With
Self-consistent modeling of feature profile evolution in plasma etching and deposition
- Author
- T. Shimada, T. Yagisawa, and T. Makabe
- Publication Title
- Magazine name Jpn.J.Appl.Phys.(Exp.Lett) Start Page L132-4 (Publication Date）2006）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With
Prediction of organic low-k material etching in two frequency capacitively coupled plasma
- Author
- K. Ishihara, T. Shimada, T. Yagisawa, and T. Makabe
- Publication Title
- Magazine name Plasma Physics and Controlled Fusion Start Page B99-104 (Publication Date）2006/11）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With
Modeling of feature profile evolution in SiO2 as functions of radial position and bias voltage under competition among charging, deposition, and etching in two-frequency capacitively coupled plasma
- Author
- T. Shimada, T. Yagisawa, and T. Makabe
- Publication Title
- Magazine name Jpn.J.Appl.Phys. Start Page 8876-82 (Publication Date）2006/11）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With
Monte Carlo analysis of ionization effects on spatiotemporal electron swarm development
- Author
- S. Dujko, Z. M. Raspopovic, R. D. White, T. Makabe and Z. Lj. Petrovic
- Publication Title
- Magazine name Eur. Phys. J: D Start Page 166-(9pp) (Publication Date）2014）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With
Effect of local gas heating on a plasma structure driven at radio frequency in a microcell in Ar at atmospheric pressure
- Author
- M. Yamasaki, T. Yagisawa, and T. Makabe
- Publication Title
- Magazine name Jpn. J. Appl. Phys. Start Page 036001(5pp) (Publication Date）2014）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With
A set of cross sections and transport coefficients for electrons in HBr
- Author
- O. Sasic, S. Dujko, T. Makabe, and Z. Lj. Petrovic
- Publication Title
- Magazine name Chem. Phys. Start Page 154-9 (Publication Date）2012）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With
Actions of low- and high-energy electrons on the phase-transition between E and H modes in an inductively coupled plasma in Ar
- Author
- Y. Hayashi, Y. Mitsui, T. Tatsumi, and T. Makabe
- Publication Title
- Magazine name New J. Physics Start Page 073025(11pp) (Publication Date）2011）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With
Workshop on atomic and molecular collision data for plasma modelling: database needs for semiconductor plasma processing
- Author
- T. Makabe and T. Tatsumi
- Publication Title
- Magazine name Plasma Sources Sci. Technol. Start Page 024014(6pp) (Publication Date）2011/04）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With
Spatiotemporal optical structure of plasmas in the E-to-H mode transition in an inductively coupled plasma in Ar
- Author
- S. Morishita, Y. Hayashi, and T. Makabe
- Publication Title
- Magazine name Plasma Sources Sci. Technol. Start Page 055007(4pp) (Publication Date）2010）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With
Numerical Investigation of Relationship between Micro-Scale Pattern, Interfacial Plasma Structure, and Feature Profile during Deep-Si Etching in Two-Frequency Capacitively Coupled Plasma in SF6/O2
- Author
- F. Hamaoka, T. Yagisawa, and T. Makabe
- Publication Title
- Magazine name J.Phys.D: Appl. Phys. Start Page 075201(9pp) (Publication Date）2009）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With
Nonequilibrium radio frequency plasma interacting with surface
- Author
- T. Makabe and T. Yagisawa
- Publication Title
- Magazine name Plasma Sources, Science and Technology Start Page 14016(9pp) (Publication Date）2009）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With
Diagnostics for low-energy electrons in a two-frequency capacitively coupled plasma in Ar
- Author
- M. Ishimaru, T. Ohba, Y. Hayashi, T. Ohmori, K. Kitajima, and T. Makabe
- Publication Title
- Magazine name Appl.Phys.Let. Start Page 071501(3pp) (Publication Date）2008）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With