Published papers
Makabe, Toshiaki
61-80 items (total 198)
RF plasma structures and its production efficiency in the frequency range from HF to VHF.-Computational investigation-.
- Author
- T. Kitamura, N. Nakano, T.Makabe, and Y. Yamaguchi
- Publication Title
- Magazine name Plasma Sources Sci. Technol Start Page 40-5 (Publication Date）1993）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With
Modeling of physical etching based on a two-dimensional velocity distributions of ions and fast neutrals by the Boltzmann equation
- Author
- T. Tokonami and T.Makabe
- Publication Title
- Magazine name J. Appl. Phys. Start Page 3323-9 (Publication Date）1992）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With
Phase transition in DC Discharges in SiH4
- Author
- Y. Yamaguchi and T.Makabe
- Publication Title
- Magazine name Jpn. J.Appl. Phys. 31 Start Page L1291-4 (Publication Date）1992）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With
Modeling of reactive non-equilibrium plasmas (in Japanese)
- Author
- T.Makabe
- Publication Title
- Magazine name Oyo Buturi Start Page 663-73 (Publication Date）1992）
- Authorship Category
- Single Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With
Diagnostics of DC-magnetron discharges by emission-selected CT technique
- Author
- S. Miyake, A. Itoh, N. Shimura, and T.Makabe
- Publication Title
- Magazine name J. Vac. Sci. Technol. A Start Page 1135-9 (Publication Date）1992）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With
Structure of velocity distribution functions and transport parameters of electron swarm in CH4 in a DC electric field
- Author
- N. Shimura and T.Makabe
- Publication Title
- Magazine name J. Phys. D. Start Page 751-60 (Publication Date）1992）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With
Study of the structure in RF glow discharges in CH4 and H2 by spatiotemporal optical emission spectroscopy
- Author
- F. Tochikubo, T.Makabe, S. Kakuta, and A. Suzuki
- Publication Title
- Magazine name J. Appl. Phys. Start Page 2143-50 (Publication Date）1992）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With
Modeling and diagnostics of structure in RF glow discharges in Ar at 13.56 MHz
- Author
- T.Makabe, N. Nakano, and Y. Yamaguchi
- Publication Title
- Magazine name Phys. Rev. A Start Page 2520-31 (Publication Date）1992）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With
Absolute measurement of the excitation rate and density of the excited species in an RF discharge from the optical emission spectroscopy
- Author
- F. Tochikubo and T.Makabe
- Publication Title
- Magazine name Meas. Sci. Technol. Start Page 1133-7 (Publication Date）1991）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With
Electron swarm in a gas discharge (in Japanese)
- Author
- H. Tagashira and T.Makabe
- Publication Title
- Magazine name Trans. IEE of Japan Start Page 131-8 (Publication Date）1991）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With
Periodic behavior of electron swarm parameters in Ar in an RF Field.
- Author
- I. Yamanashi, N. Goto, and T.Makabe
- Publication Title
- Magazine name Trans. IEEE of Japan Start Page 168-74 (Publication Date）1991）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With
Recent progress in microscopic modeling of an RF plasma CVD
- Author
- T.Makabe
- Publication Title
- Magazine name Proc.13th Symp. Ion Sources & Ion-Assisted Technol. Start Page 193-202 (Publication Date）1990）
- Authorship Category
- Single Work
- Publication Category
- Research paper (international conference proceedings)
- Peer-review Status
- With
Electron kineties in RF Discharges (in Nonequilibrium processes in partially ionized gases)
- Author
- T.Makabe
- Publication Title
- Magazine name NATO ASI.Ser.B Start Page 467-77 (Publication Date）1990）
- Authorship Category
- Single Work
- Publication Category
- Research paper (international conference proceedings)
- Peer-review Status
- With
Study of the structure in RF glow discharges in SiH4 by spatiotemporal optical emission spectroscopy.-Influence of negative ions-
- Author
- F. Tochikubo, A. Suzuki, S. Kakuta, Y. Terazono, and T.Makabe
- Publication Title
- Magazine name J.Appl.Phys. Start Page 5532-9 (Publication Date）1990）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With
Influence of negative ions in RF glow discharges in SiH4 at 13.56 MHz
- Author
- T.Makabe, F. Tochikubo, and N. Nishimura
- Publication Title
- Magazine name Phys. Rev. A Start Page 3674-7 (Publication Date）1990）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With
Investigation of the high frequency glow discharges in Ar at 13.56 MHz by spatiotemporal optical emission spectroscopy
- Author
- F. Tochikubo, S. Kakuta, A. Suzuki, and T.Makabe
- Publication Title
- Magazine name J. Phys. D Start Page 1184-92 (Publication Date）1990）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With
Time-dependent electron swarm parameters in RF fields in CH4 and H2
- Author
- N. Goto and T.Makabe
- Publication Title
- Magazine name J. Phys. D Start Page 686-93 (Publication Date）1990）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With
同心円筒形DCグロー放電によるa-Si:H成膜時の基板加熱の解析
- Author
- Y. Yamaguchi, S. Imano, K. Matsumura, and T.Makabe
- Publication Title
- Magazine name Kagaku Kougaku Ronbunshu Start Page 605-13 (Publication Date）1990）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With
Diagnostics of high-frequency discharges in CH4 / H2 by time-and space-resolved optical emission spectroscopy
- Author
- T.Kokubo, F.Tochikubo, and T.Makabe
- Publication Title
- Magazine name Appl. Phys. Lett. Start Page 818-20 (Publication Date）1990）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With
Diagnostics of low frequency CH4+H2 discharge by optical emission spectroscopy
- Author
- T.Kokubo, F.Tochikubo, and T.Makabe
- Publication Title
- Magazine name J. Phys. D Start Page 1281-7 (Publication Date）1989）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With