Makabe, Toshiaki

Toshiaki Makabe received his BSc, MSc, and PhD degrees in electrical engineering all from Keio University, and he became a Professor of EEE at Keio University in 1991. He served as a guest professor at POSTECH, Ruhr University Bochum, and Xi’an Jiaotong University. He was the Dean of the Faculty of Science and Technology from 2007 to 2009. He served as the Vice-President of Keio in charge of research between 2009 and 2017. He was appointed to the Representative for International Affairs of the Research University 11 of Japan in 2017. Now he is a Professor Emeritus at Keio University and Emeritus member of Japan Society of Applied Physics (JSAP). He has published more than 170 papers in peer-reviewed int. journals, and has given invited-talks at more than 90 int. conferences on non-equilibrium plasmas, related basic transport theory, and surface processes. In 1988, he had his opportunity to present his original Relaxation-ConTinuum (RCT) model for a low-temperature, radio-frequency (RF) plasma simulation. Direct numerical procedure (DNP) of the Boltzmann equation was proposed to study the velocity distribution and the transport of electrons in RF-fields in 1994. Robot-assisted spatiotemporal optical emission spectroscopy, i.e. computerized-tomography (CT) was developed in RF plasmas. In 2000, he integrated his modeling into “Vertically Integrated CAD for Device Processing” (VicAddress) for feature profile prediction. His study of a non-equilibrium radiofrequency plasma interacting with a surface was collected into the special issue, “80 Years of Plasma” in PSST (2009). He has authored many books, including Plasma Electronics: Applications in Microelectronic Device Fabrication (2nd edition) published by CRC Taylor & Francis Group (2014). He was on the Editorial Board of PSST and JPD, and was a guest editor of special issues in JJAP, Aust. J. Phys., JVST-A, IEEE Tran. PS, and Appl. Surf. Sci. He received the awards “Fluid Science Prize” in 2003 from the Institute of Fluid Science (Tohoku Univ.); “Plasma Electronics Prize” in 2004 from the JSAP; “Plasma Prize” in 2006 from the American Vacuum Society; “DPS Nishizawa Award” in 2017 from the JSAP, and “Will Allis Prize” in 2022 from the American Physical Society, for his “Pioneering contributions to the modeling and diagnostics as applied to plasma science and technology.” He is a foreign member of the Serbian Academy of Sciences and Arts (2013-). He is an elected Fellow of the Institute of Physics (UK), the American Vacuum Society (US), and the Japan Society of Applied Physics, etc.