Published papers
Makabe, Toshiaki
121-140 items (total 198)
Two-dimensional self-consistent simulation of a DC magnetron discharge
- Author
- E. Shidoji, H. Ohtake, N. Nakano, and T. Makabe
- Publication Title
- Magazine name Jpn.J.Appl.Phys. Start Page 2131-6 (Publication Date）1999/04）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With
Two-dimensional density distribution of metastable atoms in an inductively coupled plasma in Ar
- Author
- M. Tadokoro, H. Hirata, N. Nakano, Z. Lj. Petrovic and T. Makabe
- Publication Title
- Magazine name Phys.Rev.E Start Page 7823-30 (Publication Date）1998）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With
Diagnostics of an inductively coupled plasma in oxygen
- Author
- M. Tadokoro, A. Itoh, N. Nakano, Z. Lj. Petrovic, and T. Makabe
- Publication Title
- Magazine name IEEE Trans. on Plasma Sci. Start Page 1724-32 (Publication Date）1998）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With
Nonequilibrium plasmas for material processing in microelectronics
- Author
- Z.Lj.Petrovic, and T.Makabe
- Publication Title
- Magazine name Advanced Materials and Processes Start Page 47-56 (Publication Date）1998）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With
A novel sustaining mechanism in capacitively coupled radio frequency plasma in oxygen.
- Author
- M. Shibata, T.Makabe, and N. Nakano
- Publication Title
- Magazine name Jpn.J.Appl.Phys. Start Page 4182-5 (Publication Date）1998）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With
Phasespace modelling of a radiofrequency plasma interacting with surfaces
- Author
- T.Makabe, J.Matsui, and N.Nakano
- Publication Title
- Magazine name Pure & Appl.Chem. Start Page 1187-91 (Publication Date）1998）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With
A series of modeling of plasma etching and damage reduction: -Vertically integrated computer aided design for device precessing-
- Author
- T. Makabe, J. Matsui, and K. Maeshige
- Publication Title
- Magazine name Sci.Technol.of Adv. Materials Start Page 547-54 (Publication Date）2001）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With
Effect of aspect ratio on topographic dependent charging in oxide etching
- Author
- J. Matsui, K. Maeshige, and T. Makabe
- Publication Title
- Magazine name J.Phys.D Start Page 2950-5 (Publication Date）2001）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With
Non-equillibrium plasmas in telecommunication related technologies
- Author
- Z. Lj. Petrovic, Z. M. Paspopovic, and T. Makabe
- Publication Title
- Magazine name TELSIKS Start Page 371-380 (Publication Date）2001）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With
Optical emission spectroscopy of pulsed inductively coupled plasma In Ar
- Author
- K. Hioki, N. Itazu, Z. Lj. Petrovic, and T. Makabe
- Publication Title
- Magazine name Jpn.J.Appl.Phys. Start Page L1183-6 (Publication Date）2001）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With
Modeling and diagnostics of two-frequency pulsed ccp and related charging in the microstructure of SiO2 trench
- Author
- T. Makabe
- Publication Title
- Magazine name J.Tech.Phys. Start Page 345-59 (Publication Date）2000）
- Authorship Category
- Single Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With
Predictive study of a plasma structure and function in reactive ion etcher driven by very high frequency: Validity of an extended two-dimensional relaxation continuum model
- Author
- K. Maeshige, M. Hasebe, Y. Yamaguchi and T. Makabe
- Publication Title
- Magazine name J.Appl.Phys. Start Page 4518-24 (Publication Date）2000/10）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With
Transport coefficients and scattering cross-sections for plasma modeling in CF4-Ar mixtures: a swarm analysis
- Author
- M. Kurihara, Z. Lj. Petrovic, and T. Makabe
- Publication Title
- Magazine name J.Phys.D Start Page 2146-53 (Publication Date）2000/09）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With
Electron transport in argon in crossed electric and magnetic fields
- Author
- K. Ness and T. Makabe
- Publication Title
- Magazine name Phys. Rev. E Start Page 4083-90 (Publication Date）2000/09）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With
Functional separation of biasing and sustaining voltages in two-frequency capacitively coupled plasma
- Author
- K. Kitajima, Y. Takeo, Z. Lj. Petrovic and T. Makabe
- Publication Title
- Magazine name Appl.Phys.Let Start Page 489-91 (Publication Date）2000/07）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With
Diffusin of electronin time- dependent E(t)×B(t) fields
- Author
- Z. Raspopovic, S. Sakadzic, Z. Lj. Petrovic, and T. Makabe
- Publication Title
- Magazine name J.Phys.D Start Page 1298-1302 (Publication Date）2000/06）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With
Simulation of Magnetron Plasma
- Author
- T. Makabe
- Publication Title
- Magazine name J.Vac.Soc.Jpn. Start Page 767-72 (Publication Date）2000/05）
- Authorship Category
- Single Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With
Diagnostics of an inductively coupled CF4/Ar plasm
- Author
- K. Hioki, H. Hirata, S. Matsumura, Z. Lj. Petrovic and T. Makabe
- Publication Title
- Magazine name J.Vac.Sci.Technol.A, Start Page 864-72 (Publication Date）2000/05）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With
Micro-Cell-Plasma driven by high frequency voltage source
- Author
- M. Kurihara and T. Makabe
- Publication Title
- Magazine name J.Plasma and Fusion Research Start Page 444-8 (Publication Date）2000/05）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With
Numerical study of effects of frequency in inductively coupled plasma using Particle-in-Cell/Monte Carlo simulation
- Author
- J-S. Oh and T. Makabe
- Publication Title
- Magazine name Jpn.J.Appl.Phys. Start Page 1358-64 (Publication Date）2000/03）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With