Published papers
Makabe, Toshiaki
101-120 items (total 198)
Recent progress and issues in low temperature plasma modeling for material processings (in Japanese)
- Author
- T.Makabe
- Publication Title
- Magazine name Oyo Buturi Start Page 547-552 (Publication Date）1995）
- Authorship Category
- Single Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With
Modeling and measurement of submicron particles in RF plasmas in Ar.
- Author
- Y.Hosokawa，T.Kitajima, and T.Makabe
- Publication Title
- Magazine name Aust.J.Phys Start Page 439-52 (Publication Date）1995）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With
O2 rf discharge structure in parallel plates reactor at 13.56MHz.
- Author
- M.Shibata，N.Nakano, and T.Makabe
- Publication Title
- Magazine name J.Appl.phys Start Page 6181-7 (Publication Date）1995）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With
Study of surface charges on dielectric electrodes in a radio-frequency glow discharge
- Author
- S. Kakuta, T. Kamata, T.Makabe, S. Kobayashi, K. Terai, and T. Tamagawa
- Publication Title
- Magazine name J.Appl.Phys. Start Page 985-91 (Publication Date）1995）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With
Influence of driving frequency on narrow-gap reactive-ion etching in SF6
- Author
- N. Nakano and T.Makabe
- Publication Title
- Magazine name J. Phys. D Start Page 31-9 (Publication Date）1995）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With
Radiofrequency electron swarm transport in gases
- Author
- K.Maeda and T.Makabe
- Publication Title
- Magazine name AIAA Start Page 333-43 (Publication Date）1994）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With
Radiofrequency electron swarm transport in reactive gases and plasmas
- Author
- T. Makabe and K. Maeda
- Publication Title
- Magazine name Physica Scripta Start Page 61-9 (Publication Date）1994）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With
A correlation between particle growth and spatiotemporal RF plasma structure
- Author
- T.Kamata，S.Kakuta，Y.Yamaguchi and T.Makabe
- Publication Title
- Magazine name Plasma Sources Sci.Technol.3 Start Page 310-13 (Publication Date）1994）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With
Experimental study of very-high-frequency plasmas in H2 by spatiotemporally resolved optical emission spectroscopy
- Author
- S.Kakuta，T.Kitajima，Y.Okabe and T.Makabe
- Publication Title
- Magazine name Jpn. J. Appl. Phys. Start Page 4335-9 (Publication Date）1994）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With
A study of the sustaining mechanism in an inductively coupled plasma
- Author
- K.Kondo，H.Kuroda, and T.Makabe
- Publication Title
- Magazine name Jpn.J.Appl.Phys. Start Page 4254-7 (Publication Date）1994）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With
Time-dependent RF swarm transport by direct numerical procedure of the Boltzmann Equation
- Author
- K.Maeda and T.Makabe
- Publication Title
- Magazine name Jpn.J.Appl.Phys. Start Page 4173-6 (Publication Date）1994）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With
Influence of Ar metastable on the discharge structure in Ar and N2 mixture in RF discharges at 13.56 MHz
- Author
- F.Tochikubo，Z.Lj.Petrovic，S.Kakuta，N.Nakano and T.Makabe
- Publication Title
- Magazine name Jpn.J.Appl.Phys. Start Page 4271-5 (Publication Date）1994）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With
Two-dimensional modeling of spatiotemporal structure of coupled plasma
- Author
- K. Kamimura, K. Iyanagi, N. Nakano, and T. Makabe
- Publication Title
- Magazine name Jpn.J.Appl.Phys. Start Page 4429-35 (Publication Date）1999）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With
Numerical simulation of the discharge in d.c. magnetron sputtering
- Author
- E. Shidoji, N. Nakano, and T. Makabe
- Publication Title
- Magazine name Thin Solid Films Start Page 37-41 (Publication Date）1999）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With
Two-dimesional CT images of two-frequency capacitively coupled plasma
- Author
- T. Kitajima, Y. Takeo, and T. Makabe
- Publication Title
- Magazine name J.Vac.Sci.Technol.A Start Page 2510-16 (Publication Date）1999/11）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With
Two-dimensional modeling of a micro- cell plasma in Xe driven by high frequency
- Author
- M. Kurihara and T. Makabe
- Publication Title
- Magazine name IEEE Trans.on Plasma Sci. Start Page 1372-8 (Publication Date）1999/10）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With
Drift velocities of electrons in time varying electric fields
- Author
- S. Bzenic, Z. Lj. Petrovic, and T. Makabe
- Publication Title
- Magazine name Jpn.J.Appl.Phys. Start Page 6077-83 (Publication Date）1999/10）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With
Prediction of the evolution of the erosion profile in a direct current magnetron discharge
- Author
- K. Okazawa, E. Shidoji and T. Makabe
- Publication Title
- Magazine name J.Appl.Phys. Start Page 2984-9 (Publication Date）1999/09）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With
Dependence of driving frequency on capacitively coupled plasma in CF4
- Author
- S. Segawa, M. Kurihara, N. Nakano, and T. Makabe
- Publication Title
- Magazine name Jpn.J.Appl.Phys. Start Page 4416-22 (Publication Date）1999/07）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With
A numerical study of a collision-dominated inductively coupled plasm using article-in-Cell/Monte Carlo simulation
- Author
- J-S. Oh and T. Makabe
- Publication Title
- Magazine name Jpn.J.Appl.Phys. Start Page 4423-8 (Publication Date）1999/07）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With