Published papers
Makabe, Toshiaki
41-60 items (total 198)
Experimental determination of electron energy distribution functions in Townsend discahrges in argon
- Author
- T.Makabe, T.Goto, and T.Mori
- Publication Title
- Magazine name J. Phys. B: Atom Molec.Phys. Start Page 1781-8 (Publication Date）1977）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With
Townsend放電域へのBoltzmann方程式の適用について
- Author
- T.Makabe, T.Goto, and T.Mori
- Publication Title
- Magazine name Trans. IEE Japan Start Page 357-64 (Publication Date）1975）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With
弱電離ガス中の電子エネルギー分布関数ならびに輸送係数のモンテカルロ・シミュレーション
- Author
- T.Makabe, T.Goto, and T.Mori
- Publication Title
- Magazine name Trans. IEE Japan Start Page 229-36 (Publication Date）1973）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With
Rigorous simulation for weakly ionized gases
- Author
- T.Makabe, T.Goto, and T.Mori
- Publication Title
- Magazine name IEE CP Start Page 379-81 (Publication Date）1972）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (international conference proceedings)
- Peer-review Status
- With
Spatial distribution of nonemissive metastables in a two-frequency capacitively coupled plasma in Ar by using a pair of optical emission lines
- Author
- T. Ohba and T. Makabe
- Publication Title
- Magazine name Appl. Phys. Lett. Start Page 111501(3pp) (Publication Date）2010）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With
A method for evaluations on the radiation trapping in an inductively coupled plasma in argon
- Author
- C. Scharwitz and T. Makabe
- Publication Title
- Magazine name J. Appl. Phys. Start Page 113304(8pp) (Publication Date）2009）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With
Argon metastable state densities in inductively coupled plasma in mixtures of Ar and O2
- Author
- Y. Hayashi, S. Hirao, Y. Zhang, T. Gans, D. O'connell, Z. Lj. Petrovic, and T. Makabe
- Publication Title
- Magazine name J. Phys. D: Appl. Phys. Start Page 145206(6pp) (Publication Date）2009）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With
Oxygen atom density in rare gas diluted O2 radio frequency plasma
- Author
- T. Kitajima, J. Nakashima, T. Nakano, and T. Makabe
- Publication Title
- Magazine name Thin Solid Films Start Page 489-93 (Publication Date）2006）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With
Rare gas metastable atom density in diluted O2 RF plasmas
- Author
- T. Kitajima, K. Takahashi, T. Nakano, and T. Makabe
- Publication Title
- Magazine name IEEJ Trans. FM Start Page 37-42 (Publication Date）2006）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With
A comparative study of an unbalanced magnetron with dielectric substrate with a conventional magnetron through the use of hybrid modeling
- Author
- E. Shidoji, E. Ando, and T. Makabe
- Publication Title
- Magazine name Plasma Sources Sci. Technol. Start Page 621-6 (Publication Date）2001）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With
Transport coefficients and velocity distribution function of an ion swarm in an A.C.electric field obtained from the BGK kinetic equation
- Author
- R.Robson and T.Makabe
- Publication Title
- Magazine name Aust.J.Phys. Start Page 305-14 (Publication Date）1994）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With
Simulations of rf glow discharge in SF6 by the relaxation continuum model: Physical structure and function of the narrow-gap reactive-ion etcher
- Author
- N.Nakano，N.Shimura，Z.Lj.Petrovic and T.Makabe
- Publication Title
- Magazine name Phys. Rev. E Start Page 4455-65 (Publication Date）1994）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With
The radical transport in the narrow-gap-reactive-ion etcher in SF6 by the relaxation continuum model
- Author
- N.Nakano，Z.Lj.Petrovic, and T.Makabe
- Publication Title
- Magazine name Jpn.J.Appl.Phys. Start Page 2223-30 (Publication Date）1994）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With
Investigation of the ion ejection mechanisms of gallium liquid metal ion sources
- Author
- Y. Nakayama and T.Makabe
- Publication Title
- Magazine name J.Phys.D Start Page 1769-75 (Publication Date）1993）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With
Influence of frequency，pressure and mixture ratio of electronegative gas on electrical characteristics of rf discharges in N2 - SF6 mixtures
- Author
- S. Kakuta, Z. Lj. Petrovic, and T.Makabe
- Publication Title
- Magazine name J.Appl.Phys. Start Page 4923-31 (Publication Date）1993）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With
Frequency dependence on the structure of RF glow discharges in Ar.
- Author
- S. Kakuta, T.Makabe and F. Tochikubo
- Publication Title
- Magazine name J.Appl.Phys. Start Page 4907-14 (Publication Date）1993）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With
RF plasma for i-carbon deposition (in Japanese)
- Author
- T.Makabe
- Publication Title
- Magazine name New Diamond Start Page 14-9 (Publication Date）1993）
- Authorship Category
- Single Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With
Spatiotemporal optical emission spectroscopy of RF discharges in SF6
- Author
- Z. Petrovic, F. Tochikubo, S. Kakuta, and T.Makabe
- Publication Title
- Magazine name J.Appl.Phys. Start Page 2163-72 (Publication Date）1993）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With
Electron velocity distribution function in a gas in ExB fields.
- Author
- N. Shimura and T.Makabe
- Publication Title
- Magazine name Appl.Phys.Lett. Start Page 678-80 (Publication Date）1993）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With
Theoretical analysis of electron velocity distributions and transport coefficients in HCl in a DC electric field.
- Author
- N. Shimura and T.Makabe
- Publication Title
- Magazine name Jpn.J.App.Phys. Start Page 949-54 (Publication Date）1993）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With