Published papers
Makabe, Toshiaki
1-20 items (total 198)
Advances in computational plasma science for low-temperature RF plasmas(APEX REVIEW)
- Author
- Toshiaki Makabe
- Publication Title
- Magazine name Appl. Phys. Express Start Page 070106 (18pp) (Publication Date）2026/07）
- Authorship Category
- Single Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With
Interrelation of electron diffusion tensor among position, velocity, and phase spaces in gases
- Author
- Toshiaki Makabe
- Publication Title
- Magazine name Plasma Sources Sci. Technol. Start Page 015016 (8pp) (Publication Date）2026/01）
- Authorship Category
- Single Work
- Publication Category
- Research paper (scientific journal)
Drift velocity of charged particles in gases: general relationship between drift velocities in position and velocity spaces
- Author
- Toshiaki Makabe
- Publication Title
- Magazine name Phys. Scr. Start Page 035615 (8pp) (Publication Date）2025/02）
- Authorship Category
- Single Work
- Publication Category
- Research paper (scientific journal)
Historical development of electron swarm physics based on the Boltzmann equation towards in-depth understanding of a low-temperature collisional plasma (Topical Review)
- Author
- T. Makabe and H. Sugawara
- Publication Title
- Magazine name Plasma Sources Sci. Technol. Start Page 093001 (23pp) (Publication Date）2024/09）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With
Current status and new insights about the capacitively coupled electronegative plasma source: injection of energetic beam-like electrons to electrode
- Author
- Toshiaki Makabe
- Publication Title
- Magazine name J. Phys. D. 56 Start Page 045203 (17pp) (Publication Date）2023/01）
- Authorship Category
- Single Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With
Review and current status: E-H mode transition in low-temperature ICP and related electron dynamics (Topical Review)
- Author
- Toshiaki Makabe
- Publication Title
- Magazine name Plasma Sources Sci. Technol. Start Page 023001(16pp) (Publication Date）2021/02）
- Authorship Category
- Single Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With
Sustainability of active bulk plasma with high electronegativity in capacitive high frequency plasma
- Author
- Toshiaki Makabe
- Publication Title
- Magazine name Jap. J. Appl. Phys. Start Page 026002(6pp) (Publication Date）2022/02）
- Authorship Category
- Single Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With
Pulsed plasmas and related electron energy control for dry etching
- Author
- T. Makabe and Z.Lj.Petrovic
- Publication Title
- Magazine name Physics of Ionized Gases Start Page 305-325 (Publication Date）1999）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With
The effect of laser-induced photo-detachment in O_2_ RF discharges
- Author
- M.Shibata，N.Nakano and T.Makabe
- Publication Title
- Magazine name J. Phys. D Start Page 1219-24 (Publication Date）1997）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With
Frequency variation of the mean energy of rf electron swarm.
- Author
- R.E.Robson，K.Maeda，T.Makabe and R.D.White
- Publication Title
- Magazine name Aust.J.Phys Start Page 335-46 (Publication Date）1995）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With
Spatiotemporal characteristics determined by a relaxation continuum model of an inductively coupled plasma
- Author
- K.Kondo，H.Kuroda and T.Makabe
- Publication Title
- Magazine name Appl. Phys. Lett. Start Page 31-3 (Publication Date）1994）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With
Computer simulation of plasma etching (in Japanese)
- Author
- T.Makabe
- Publication Title
- Magazine name Plasma & Fusion Research Start Page 15-26 (Publication Date）1993）
- Authorship Category
- Single Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With
Time-resolved measurement of charging on hole bottoms of SiO2 wafer exposed to plasma etching in a pulsed two- frequency capacitively coupled plasma
- Author
- T. Ohmori, T. K. Goto, T. Kitajima, and T. Makabe
- Publication Title
- Magazine name Jpn.J.Appl.Phys.(Exp. Lett.) Start Page L1105-08 (Publication Date）2005）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With
Electron transport coefficients in O2 magnetron discharges
- Author
- R. D. White, K. E. Ness, R. E. Robson, and T. Makabe
- Publication Title
- Magazine name J.Phys.D Start Page 997-1004 (Publication Date）2005）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With
Vertically integrated computer aided design for device processing
- Author
- T. Makabe and K. Maeshige
- Publication Title
- Magazine name Appl.Surf.Sci Start Page 176-200 (Publication Date）2002）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With
Low pressure nonequilibrium plasma for topdown nanoprocess
- Author
- T. Makabe and T. Yagisawa
- Publication Title
- Magazine name Plasma Sources Sci. Technol. Start Page 024011(12pp) (Publication Date）2011/04）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With
Increased O(1D) metastable flux with Ar and Kr diluted oxygen plasmas and improved film properties of grown SiO2 film
- Author
- T.Kitajima, N.Nakano, and T. Makabe
- Publication Title
- Magazine name J.Vac. Sci. & Technol. A Start Page 1308-12 (Publication Date）2008）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With
Two dimensional images of radiative and metastable excited state radial profiles for an inductively coupled plasma in argon
- Author
- H. Hirata, M. Tadokoro, N. Nakano, Z. Lj. Petrovic, and T. Makabe
- Publication Title
- Magazine name IEEE Trans. on Plasma Sci. Start Page 50-1 (Publication Date）1999/03）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With
Effect of frequency on the two-dimensional structure of capacitively coupled plasma in Ar
- Author
- T. Kitajima, Y. Takeo, and T. Makabe
- Publication Title
- Magazine name Jpn.J.Appl.Phys. Start Page 5928-36 (Publication Date）1998/12）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With
Expression for momentum-transfer scattering in inelastic collisions in electron transport in a collisional plasma
- Author
- T. Makabe and R. WHITE
- Publication Title
- Magazine name J.Phys.D: Appl.Phys. Publisher IOP Start Page 485205(4pp) (Publication Date）2015/11）
- Authorship Category
- Joint Work
- Peer-review Status
- With