著書

This chapter describes the hybrid integration of quantum-dot single-photon sources (QD SPSs) on Si toward the scalable Si quantum photonics. In this study, transfer printing (TP) has been extensively investigated, a technique that simply relies on pick-and-place integration based on van der Waals force, and thus is fully compatible with the CMOS back-end process to exploit mature CMOS technology. Using TP, QD SPSs were hybrid integrated on a CMOS Si chip. It was confirmed that the integrated QDs can generate single photons on a CMOS Si chip. We also observed efficient waveguide coupling of emitted single photons. Furthermore, we extended our TP method for investigating the multiple identical SPSs hybrid integrated on Si. We believe that our TP-based approach will provide a novel pathway toward the scalable implementation of multiple identical QD SPSs on the same CMOS Si chip.