Presentations
Nakano, Nobuhiko
161-179 items (total 179)
Robot Assisted Three Dimensional Optical Emission Tomography of Inductively Coupled Plasma
- Speaker
- Akifumi Okigawa, Masahiro Tadokoro,Nobuhiko Nakano, Akihiko Itoh , and Toshiaki Makabe
- Conference Title
- [Conference Category International presentation] Conference Title American Vacuum Society 43rd National Symposium Organizer (14-18 Oct 1996, Philadelphia, USA) Dates 1996.10 - 1996.10
- Organizer
- (14-18 Oct 1996, Philadelphia, USA)
- Presentation Format
- International presentation
A two dimensional modeling of capacitively coupled plasma reactor
- Speaker
- Nobuhiko Nakano, and Toshiaki Makabe
- Conference Title
- [Conference Category International presentation] Conference Title American Vacuum Society 43rd National Symposium Organizer (14-18 Oct 1996, Philadelphia, USA) Dates 1996.10 - 1996.10
- Organizer
- (14-18 Oct 1996, Philadelphia, USA)
- Presentation Format
- International presentation
Comparison of net production rate between 100MHz and 13.56MHz in capacitively coupled plasma in Ar by 2D optical emission spectroscopy
- Speaker
- Takeshi Kitajima, Mitsutaka Izawa,Nobuhiko Nakano, and Toshiaki Makabe
- Conference Title
- [Conference Category International presentation] Conference Title 18th International Symposium on the Physics of Ionized Gases Organizer (2-6 Sep 1996, Kotor, Yugoslavia) Dates 1996.09 - 1996.09
- Organizer
- (2-6 Sep 1996, Kotor, Yugoslavia)
- Presentation Format
- International presentation
Diagnostics of non-equilibrium inductively coupled plasmas in Argon
- Speaker
- Akifumi Okigawa, Masahiro Tadokoro, Nobuhiko Nakano, and Toshiaki Makabe, Zoran Lj. Petrovi'c, and Akihiko Itoh
- Conference Title
- [Conference Category International presentation] Conference Title 18th International Symposium on the Physics of Ionized Gases, Organizer (2-6 Sep 1996, Kotor, Yugoslavia) Dates 1996.09 - 1996.09
- Organizer
- (2-6 Sep 1996, Kotor, Yugoslavia)
- Presentation Format
- International presentation
Modeling of narrow gap reactive ion etcher by the relaxation continuum model
- Speaker
- Nobuhiko Nakano, and Toshiaki Makabe
- Conference Title
- [Conference Category International presentation] Conference Title 18th International Symposium on the Physics of Ionized Gases Organizer (2-6 Sep 1996, Kotor, Yugoslavia) Invited Physics of Ionized Gases, (1996)269-278 Dates 1996.09 - 1996.09
- Organizer
- (2-6 Sep 1996, Kotor, Yugoslavia) Invited Physics of Ionized Gases, (1996)269-278
- Presentation Format
- International presentation
Time resolved -2D- optical emission spectroscopy in rf capacitively coupled plasma
- Speaker
- Takeshi Kitajima, Mitsutaka Izawa,Nobuhiko Nakano, and Toshiaki Makabe
- Conference Title
- [Conference Category International presentation] Conference Title 13th European Sectional Conference on the Atomic and Molecular Physics of Ionised Gases Organizer (27-30 Aug 1996, Poprad, Slovakia) Dates 1996.08 - 1996.08
- Organizer
- (27-30 Aug 1996, Poprad, Slovakia)
- Presentation Format
- International presentation
A two dimensional modeling of parallel plate rf plasma in Ar
- Speaker
- Nobuhiko Nakano, and Toshiaki Makabe
- Conference Title
- [Conference Category International presentation] Conference Title 13th European Sectional Conference on the Atomic and Molecular Physics of Ionised Gases Organizer (27-30 Aug 1996, Poprad, Slovakia) Dates 1996.08 - 1996.08
- Organizer
- (27-30 Aug 1996, Poprad, Slovakia)
- Presentation Format
- International presentation
2D-Spatiotemporal Structure of ICP Reactor
- Speaker
- Kazuhiro Kamimura, Toshiaki Makabe, Nobuhiko Nakano, and Shinji Nakagami
- Conference Title
- [Conference Category International presentation] Conference Title IEEE International Conference on Plasma Science Organizer (5-8 June 1995, Madison, USA) Dates 1995.06 - 1995.06
- Organizer
- (5-8 June 1995, Madison, USA)
- Presentation Format
- International presentation
Modeling of RF Glow Discharges by Direct Numerical Procedure of the Boltzmann Equation
- Speaker
- Nobuhiko Nakano, and Toshiaki Makabe
- Conference Title
- [Conference Category International presentation] Conference Title IEEE International Conference on Plasma Science Organizer (5-8 June 1995, Madison, USA) Dates 1995.06 - 1995.06
- Organizer
- (5-8 June 1995, Madison, USA)
- Presentation Format
- International presentation
A Spatiotemporal Structure of ICP Reactor in two-dimensional model
- Speaker
- Kazuhiro Kamimura, Toshiaki Makabe, Shinji Nakagami, and Nobuhiko Nakano
- Conference Title
- [Conference Category International presentation] Conference Title 187th Meeting of The Electrochemical Society, Organizer (21-26 May 1995, Reno, USA) Dates 1995.05 - 1995.05
- Organizer
- (21-26 May 1995, Reno, USA)
- Presentation Format
- International presentation
Modeling of RF glow discharges in O2 by RCT model
- Speaker
- Mari Shibata, Nobuhiko Nakano, and Toshiaki Makabe
- Conference Title
- [Conference Category International presentation] Conference Title The Third World Congress on Computational Mechanics (1-5 August 1994, Chiba, Japan)International Association for Computational Mechanics Dates 1994.08 - 1994.08
- Presentation Format
- International presentation
Modeling of RF glow discharges by direct numerical procedure of the Boltzmann equation using parallel computer
- Speaker
- Nobuhiko Nakano, and Toshiaki Makabe
- Conference Title
- [Conference Category International presentation] Conference Title The Third World Congress on Computational Mechanics (1-5 August 1994, Chiba, Japan)International Association for Computational Mechanics Dates 1994.08 - 1994.08
- Presentation Format
- International presentation
Influence of stepwise ionization in Ar and N2 mixture in RF discharges at 13.56MHz
- Speaker
- Fumiyoshi Tochikubo, Zoran Lj. Petrovi'c, Shigeru Kakuta, Nobuhiko Nakano, and Toshiaki Makabe
- Conference Title
- [Conference Category International presentation] Conference Title in Proceedings of the International Conference on Reactive Plasmas Organizer (19-21 January, Yokohama, Japan)Japan Society of Applied Physics, (1994)207-210 Dates 1994.01 - 1994.01
- Organizer
- (19-21 January, Yokohama, Japan)Japan Society of Applied Physics, (1994)207-210
- Presentation Format
- International presentation
Influence of driving frequency on RF glow discharges in electronegative gases
- Speaker
- Nobuhiko Nakano, Zoran Lj. Petrovi'c, and Toshiaki Makabe
- Conference Title
- [Conference Category International presentation] Conference Title in Proceedings of the International Conference on Reactive Plasmas Organizer (19-21 January, Yokohama, Japan)Japan Society of Applied Physics, (1994)81-84 Dates 1994.01 - 1994.01
- Organizer
- (19-21 January, Yokohama, Japan)Japan Society of Applied Physics, (1994)81-84
- Presentation Format
- International presentation
Modeling of SF6 Narrow-Gap-RIE by RCT model
- Speaker
- Nobuhiko Nakano, Naohiko Shimura, Zoran Lj. Petrovi'c, and Toshiaki Makabe
- Conference Title
- [Conference Category International presentation] Conference Title in Proceedings of SYMPOSIUM on DRY PROCESS Organizer (1-2 November 1993, Tokyo, Japan),The Institute of Electrical Engineers of Japan, (1993)5-10 Dates 1993.11 - 1993.11
- Organizer
- (1-2 November 1993, Tokyo, Japan),The Institute of Electrical Engineers of Japan, (1993)5-10
- Presentation Format
- International presentation
Modeling of RF Glow discharges in SF6 by RCT Model
- Speaker
- Nobuhiko Nakano, Naohiko Shimura, Zoran Lj.Petrovi'c, and Toshiaki Makabe
- Conference Title
- [Conference Category International presentation] Conference Title 45th Annual Gaseous Electronics Conference Organizer (22-25 October 1992, Boston, USA) Dates 1992.10 - 1992.10
- Organizer
- (22-25 October 1992, Boston, USA)
- Presentation Format
- International presentation
Modeling and diagnostics of RF glow discharges in Ar
- Speaker
- Toshiaki Makabe, Nobuhiko Nakano,Fumiyoshi Tochikubo, and Shigeru Kakuta
- Conference Title
- [Conference Category International presentation] Conference Title 44th Annual Gaseous Electronics Conference Organizer (27-30 October 1991, New Mexico, USA) Dates 1991.10 - 1991.10
- Organizer
- (27-30 October 1991, New Mexico, USA)
- Presentation Format
- International presentation
Numerical Analysis of RF Glow Discharges in HCl by RCT Model
- Speaker
- Nobuhiko Nakano, Toshiaki Makabe,Naohiko Shimura
- Conference Title
- [Conference Category International presentation] Conference Title 44th Annual Gaseous Electronics Conference Organizer (27-30 October 1991, New Mexico, USA) Dates 1991.10 - 1991.10
- Organizer
- (27-30 October 1991, New Mexico, USA)
- Presentation Format
- International presentation
Modeling and optical diagnostics of reactive RF glow discharges in CH4 at 13.56MHz
- Speaker
- Toshiaki Makabe, Nobuhiko Nakano,Akira Suzuki, Fumiyoshi Tochikubo, and Yukio Yamaguchi
- Conference Title
- [Conference Category International presentation] Conference Title 43rd Annual Gaseous Electronics Conference Organizer (October 1990, Champaign-Urbana, Illinois) Dates 1990.10 - 1990.10
- Organizer
- (October 1990, Champaign-Urbana, Illinois)
- Presentation Format
- International presentation