Presentations
Nakano, Nobuhiko
141-160 items (total 179)
Two Dimensional Modeling of Ar RF ICP by RCT Model
- Speaker
- Katsumi Iyanagi, Nobuhiko Nakano, and Toshiaki Makabe
- Conference Title
- [Conference Category International presentation] Conference Title 50th Annual Gaseous Electronics Conference Organizer (6-9 October 1997, Madison, USA) Dates 1997.10 - 1997.10
- Organizer
- (6-9 October 1997, Madison, USA)
- Presentation Format
- International presentation
Electron Transport to a Substrate in an rf Capacitively Coupled Plasma by the Boltzmann Equation
- Speaker
- Jun Matsui, Nobuhiko Nakano, and Toshiaki Makabe
- Conference Title
- [Conference Category International presentation] Conference Title 50th Annual Gaseous Electronics Conference, Organizer (6-9 October 1997, Madison, USA) Dates 1997.10 - 1997.10
- Organizer
- (6-9 October 1997, Madison, USA)
- Presentation Format
- International presentation
Two-D Emission profile of parallel plate RF plasma -Effect of driving frequency-
- Speaker
- Takeshi Kitajima, Nobuhiko Nakano, and Toshiaki Makabe
- Conference Title
- [Conference Category International presentation] Conference Title 50th Annual Gaseous Electronics Conference, Organizer (6-9 October 1997, Madison, USA) Dates 1997.10 - 1997.10
- Organizer
- (6-9 October 1997, Madison, USA)
- Presentation Format
- International presentation
Electron Transport in CF4 by using DNP of the Boltzmann equation
- Speaker
- Masaru Kurihara, Nobuhiko Nakano, and Toshiaki Makabe
- Conference Title
- [Conference Category International presentation] Conference Title 50th Annual Gaseous Electronics Conference Organizer (6-9 October 1997, Madison, USA) Dates 1997.10 - 1997.10
- Organizer
- (6-9 October 1997, Madison, USA)
- Presentation Format
- International presentation
Nonvolatile Particle Transport from Etched Surface in 2-D CCP Modeling
- Speaker
- Masao Hasebe, Nobuhiko Nakano, and Toshiaki Makabe
- Conference Title
- [Conference Category International presentation] Conference Title 50th Annual Gaseous Electronics Conference Organizer (6-9 October 1997, Madison, USA) Dates 1997.10 - 1997.10
- Organizer
- (6-9 October 1997, Madison, USA)
- Presentation Format
- International presentation
Plasma Characteristics of Two-Frequency-Operated-Plasma in Ar by Two-Dimensional Modeling
- Speaker
- Nobuhiko Nakano, and Toshiaki Makabe
- Conference Title
- [Conference Category International presentation] Conference Title 50th Annual Gaseous Electronics Conference Organizer (6-9 October 1997, Madison, USA) Dates 1997.10 - 1997.10
- Organizer
- (6-9 October 1997, Madison, USA)
- Presentation Format
- International presentation
Phase-space modeling of electrons interacting with surface in reactive ion etcher
- Speaker
- Toshiaki Makabe, Jun Matsui, and Nobuhiko Nakano
- Conference Title
- [Conference Category International presentation] Conference Title International symposium on plasma and flow simulation for materials processing Organizer (10-12 July 1997, Sendai, Japan) Dates 1997.07 - 1997.07
- Organizer
- (10-12 July 1997, Sendai, Japan)
- Presentation Format
- International presentation
Two dimensional modeling of a two frequency driven plasma in Ar
- Speaker
- Nobuhiko Nakano, and Toshiaki Makabe
- Conference Title
- [Conference Category International presentation] Conference Title International symposium on plasma and flow simulation for materials processing Organizer (10-12 July 1997, Sendai, Japan) Dates 1997.07 - 1997.07
- Organizer
- (10-12 July 1997, Sendai, Japan)
- Presentation Format
- International presentation
Space- and Time- Resolved 3-D Profile of Inductively Coupled Plasma in O2
- Speaker
- Masahiro Tadokoro, Nobuhiko Nakano, Zoran Lj. Petrovi'c, and Toshiaki Makabe
- Conference Title
- [Conference Category International presentation] Conference Title 191st Meeting of The Electrochemical Society Organizer (4-9 May 1997, Montreal, Canada) Dates 1997.05 - 1997.05
- Organizer
- (4-9 May 1997, Montreal, Canada)
- Presentation Format
- International presentation
Electron transport to a substrate in an rf capacitively coupled plasma for etching by the Boltzmann Equation
- Speaker
- Toshiaki Makabe, Jun Matsui,Nobuhiko Nakano
- Conference Title
- [Conference Category International presentation] Conference Title International Workshop on Basic Aspects of Nonequilibrium Plasmas Interacting with Surfaces Organizer (26-27 Jan 1997, Shirahama, Japan) Dates 1997.01 - 1997.01
- Organizer
- (26-27 Jan 1997, Shirahama, Japan)
- Presentation Format
- International presentation
Three dimensional optical emission tomography of an inductively couples plasma
- Speaker
- Akifumi Okigawa, Nobuhiko Nakano, and Toshiaki Makabe
- Conference Title
- [Conference Category International presentation] Conference Title 3rd international conference on reactive plasmas Organizer (21-24 Jan 1997, Nara, Japan) Dates 1997.01 - 1997.01
- Organizer
- (21-24 Jan 1997, Nara, Japan)
- Presentation Format
- International presentation
2D optical emission spectroscopy in 100MHz capacitively couples plasma
- Speaker
- Takeshi Kitajima, Nobuhiko Nakano, and Toshiaki Makabe
- Conference Title
- [Conference Category International presentation] Conference Title 3rd international conference on reactive plasmas Organizer (21-24 Jan 1997, Nara, Japan) Dates 1997.01 - 1997.01
- Organizer
- (21-24 Jan 1997, Nara, Japan)
- Presentation Format
- International presentation
A 2D Dust particle distribution in CCP reactor
- Speaker
- Ryuichi Hashido, Masao Hasebe, Yoshiyuki Hosokawa, Nobuhiko Nakano, Toshiaki Makabe, and Masayuki Hachiya
- Conference Title
- [Conference Category International presentation] Conference Title 3rd international conference on reactive plasmas Organizer (21-24 Jan 1997, Nara, Japan) Dates 1997.01 - 1997.01
- Organizer
- (21-24 Jan 1997, Nara, Japan)
- Presentation Format
- International presentation
Two dimensional modeling of high density inductively coupled plasma sources in Ar
- Speaker
- Katsumi Iyanagi, Nobuhiko Nakano, and Toshiaki Makabe
- Conference Title
- [Conference Category International presentation] Conference Title 3rd international conference on reactive plasmas Organizer (21-24 Jan 1997, Nara, Japan) Dates 1997.01 - 1997.01
- Organizer
- (21-24 Jan 1997, Nara, Japan)
- Presentation Format
- International presentation
Two dimensional modeling of a capacitively coupled plasma by two frequency operation
- Speaker
- Nobuhiko Nakano, Toshiaki Makabe, and Masayuki Hachiya
- Conference Title
- [Conference Category International presentation] Conference Title 3rd international conference on reactive plasmas Organizer (21-24 Jan 1997, Nara, Japan) Dates 1997.01 - 1997.01
- Organizer
- (21-24 Jan 1997, Nara, Japan)
- Presentation Format
- International presentation
Comparative study of the characteristics between CCP and ICP by 2D-modeling/ diagnostics
- Speaker
- Toshiaki Makabe, and Nobuhiko Nakano
- Conference Title
- [Conference Category International presentation] Conference Title Electrochemical Society Proceedings Dates 1996 - 1996
- Presentation Format
- International presentation
'Modeling of narrow gap reactive ion etcher by the relaxation continuum model'
- Speaker
- N.Nakano and T.Makabe
- Conference Title
- [Conference Category International presentation] Conference Title Physics of Ionized Gases Dates 1996.12 - 1996.12
- Invitation Status
- Without
- Presentation Format
- International presentation
- Language of Publication
- English
- Conference Category
- Oral presentation (invited, special)
Influence of magnetic field on the structure in ICP(-Modeling and CT measurement-)
- Speaker
- Toshiaki Makabe, Katsumi Iyanagi, Akifumi Okigawa, and Nobuhiko Nakano
- Conference Title
- [Conference Category International presentation] Conference Title 49th Annual Gaseous Electronics Conference Organizer (20-24 October 1996, Argonne, USA) Dates 1996.10 - 1996.10
- Organizer
- (20-24 October 1996, Argonne, USA)
- Presentation Format
- International presentation
Three dimensional optical emission tomography of inductively coupled plasma in Ar
- Speaker
- Akifumi Okigawa, Masahiro Tadokoro, Nobuhiko Nakano, and Toshiaki Makabe
- Conference Title
- [Conference Category International presentation] Conference Title 49th Annual Gaseous Electronics Conference Organizer (20-24 October 1996, Argonne, USA) Dates 1996.10 - 1996.10
- Organizer
- (20-24 October 1996, Argonne, USA)
- Presentation Format
- International presentation
A two dimensional modeling of capacitively coupled plasma reactor
- Speaker
- Nobuhiko Nakano, and Toshiaki Makabe
- Conference Title
- [Conference Category International presentation] Conference Title 49th Annual Gaseous Electronics Conference Organizer (20-24 October 1996, Argonne, USA) Dates 1996.10 - 1996.10
- Organizer
- (20-24 October 1996, Argonne, USA)
- Presentation Format
- International presentation