Keio University
1-14 items (total 14)

Plasma Electronics: Applications in Microelectronic Device Fabrication (3rd edition)

Author
Toshiaki Makabe and Zoran Petrovic
Publisher
CRC Press (Boca, London, New York)
Role
Joint author
Book Category
Scholarly book

プラズマエレクトロニクス

Author
真壁 利明
Publisher
培風館
Role
Sole author
Book Category
Scholarly book

Gaseous Electronics and Its Applications

Author
R. W. Crompton, T. Makabe, et al.
Publisher
Kluwer Academic Pub. (Dordrecht, Holland)
Role
Joint author
Book Category
Scholarly book

理工学基礎・確率過程

Author
中川正雄,真壁 利明
Publisher
培風館
Role
Joint author
Book Category
Scholarly book

Plasma Electronics: Applications in Microelectronic Device Fabrication (2nd edition)

Author
Toshiaki Makabe and Zoran Petrovic
Publisher
CRC Press (Boca, London, New York)
Role
Joint author
Book Category
Scholarly book

Plasma Electronics: Applications in Microelectronic Device Fabrication

Author
Toshiaki Makabe and Zoran Petrovic
Publisher
Taylor & Francis (New York, London)
Role
Joint author
Book Category
Scholarly book

Advannces in Low Temperature rf-Plasmas: Basis for process design

Author
Toshiaki Makabe, Edited
Publisher
Elsevier (Amsterdam)
Role
Joint author
Book Category
Scholarly book

電子情報通信ハンドブック

Author
真壁 利明(分担)
Publisher
オーム社
Role
Joint author
Book Category
Scholarly book

放電ハンドブック

Author
真壁 利明(分担)
Publisher
オーム社
Role
Joint author
Book Category
Scholarly book

応用物理用語大辞典

Author
真壁 利明(分担)
Publisher
オーム社
Role
Joint author
Book Category
Scholarly book

フリーラジカルの科学

Author
真壁 利明(分担)
Publisher
学会出版センター
Role
Joint author
Book Category
Scholarly book

集積回路プロセス技術シリーズ半導体ドライエッチング技術

Author
真壁 利明(分担)
Publisher
産業図書
Role
Joint author
Book Category
Scholarly book

プラズマ材料科学ハンドブック

Author
真壁 利明(分担)
Publisher
オーム社
Role
Joint author
Book Category
Scholarly book

確率過程

Author
真壁 利明,中川 正雄
Publisher
培風館
Role
Joint author
Book Category
Scholarly book