Published papers
Matsumoto, Yoshinori
41-60 items (total 86)
傾斜回転による三次元加工法
- Author
- 花井 計，中原 崇，鈴木慎也，松本佳宣
- Publication Title
- Volume 126(Issue 6) Start Page 222-227 (Publication Date）2006/06）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- Without
Fabrication of Three Dimensional Structures by Image-Processing Technique
- Author
- Kei Hanai, Takashi Nakahara, Sayaka Shimizu, Yoshinori Matsumoto
- Publication Title
- Magazine name Sensor and Materials Volume 18(Issue 1) Start Page 49-61 (Publication Date）2006/01）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (conference, symposium, etc.)
- Peer-review Status
- With
Magnetic mesa structures fabricated by reactive ion etching with CO/NH3/Xe plasma chemistry for an all-silicon quantum computer
- Author
- Dong F. Wang, A. Takahashi, Y. Matsumoto, K.M. Itoh, Y. Yamamoto, T. Ono and M. Esashi
- Publication Title
- Magazine name Nanotechnology 16 Start Page 990-994 (Publication Date）2005）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (conference, symposium, etc.)
- Peer-review Status
- With
バイナリオプティクスによるネガ型レジストの三次元形状
- Author
- 花井 計，清水 さやか，松本佳宣
- Publication Title
- Volume 125(Issue 10) Start Page 424-425 (Publication Date）2005/10）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With
高アスペクト比立体形状への配線パターン露光法の開発
- Author
- 花井 計，田村 喜朗，松本佳宣
- Publication Title
- Volume 125(Issue 6) Start Page 280-281 (Publication Date）2005/06）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (conference, symposium, etc.)
- Peer-review Status
- With
グレイスケールリソグラフィと構造体転写を用いた感光材料と樹脂材料の微細３次元加工
- Author
- RYOUTAROU MORI, KEI HANAI, MATSUMOTO YOSHINORI
- Publication Title
- Volume 124(Issue 10) Start Page 359-363 (Publication Date）2004/10）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With
短距離通信用CMOS集積化光受信器の開発
- Author
- KEI KUWABARA, MATSUMOTO YOSHINORI
- Publication Title
- Volume J87-C(Issue 4) Start Page 396-403 (Publication Date）2004/04）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With
微小クロムパターンを用いたグレイスケールリソグラフィーの研究
- Author
- 花井 計、松本 佳宣
- Publication Title
- Volume 123(Issue 10) Start Page 410-415 (Publication Date）2003/10）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (conference, symposium, etc.)
- Peer-review Status
- With
無電解めっき法によるガラス貫通配線の形成
- Author
- 中丸 文雄、松本 佳宣
- Publication Title
- Volume 123(Issue ８) Start Page 313-314 (Publication Date）2003/08）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (conference, symposium, etc.)
- Peer-review Status
- With
Damage Free Dicing Method for MEMS Devices
- Author
- Y. Matsumoto ,Y. Awatani, K. Kato
- Publication Title
- Magazine name 電気学会論文誌 E Volume 123(Issue 7) Start Page 255-256 (Publication Date）2003/07）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (conference, symposium, etc.)
- Peer-review Status
- With
Novel high efficiency concentrator for optical fiber communication
- Author
- F. Nakamaru, Y. Matsumoto, A. Nakazono
- Publication Title
- Magazine name IEEE Photonics Technology Letters Volume 14(Issue 7, July) Start Page 953-955 (Publication Date）2002）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (conference, symposium, etc.)
- Peer-review Status
- Without
グレイスケールマスクを用いたガラスの三次元微細加工技術
- Author
- 鹿又 学、松本 佳宣
- Publication Title
- Volume 122(Issue １１) Start Page 531-536 (Publication Date）2002/11）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (conference, symposium, etc.)
- Peer-review Status
- Without
High efficiency optical coupler for a small photo acceptance area photodiode used in the high speed plastic optical fiber communication
- Author
- Y. Matsumoto, A. Nakazono, T. Kitahara, Y. Koike
- Publication Title
- Magazine name Sensors and Actuators A Start Page 318-322 (Publication Date）2002/08）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (conference, symposium, etc.)
- Peer-review Status
- Without
Novel high efficiency concentrator for optical fiber communication
- Author
- F. Nakamaru, Y. Matsumoto, A. Nakazono
- Publication Title
- Magazine name The 2001 International Conference on Optical MEMS 2001, Start Page 125-126 (Publication Date）2001/09）
- Authorship Category
- Joint Work
- Peer-review Status
- With
Small and high-sensitive three axis SOI capacitive accelerometer
- Author
- Y.Yamaguchi, F.Katsumata, M.Nishimura, Y.Matsumoto, M.Ishida
- Publication Title
- Magazine name The Transaction of IEEE Japan Volume 121-E(Issue 7, July) Start Page 362-366 (Publication Date）2001/07）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (conference, symposium, etc.)
- Peer-review Status
- Without
グレイスケールマスク製作法とそれを用いた３次元微細加工法
- Publication Title
- (Publication Date）2001/07）
- Authorship Category
- Single Work
- Peer-review Status
- Without
Novel optical transceiver with compound parabolic concentrator for graded index plastic opticalfiber
- Author
- Y. Matsumoto, A. Nakazono, T. Kitahara, Y. Koike
- Publication Title
- Magazine name The 2001 International Conference on Solid-State Sensor and Actuators Start Page 202-205 (Publication Date）2001/06）
- Authorship Category
- Joint Work
- Peer-review Status
- With
Development and evaluation of capacitance detection ASIC for three-axis capacitive accelerometer
- Author
- Y. Matsumoto, S. Kawahito, M.Ishida
- Publication Title
- Magazine name The Transaction of IEEE Japan Volume 121-E,(Issue 3, March) Start Page 135-141 (Publication Date）2001/03）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (conference, symposium, etc.)
- Peer-review Status
- Without
The property of plasma polymerized fluorocarbon film in relation to CH4/C4F8 ratio and substrate temperature
- Author
- Y. Matsumoto, M. Ishida
- Publication Title
- Magazine name Sensors and Actuators A Start Page 179-185 (Publication Date）2000/05）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (conference, symposium, etc.)
- Peer-review Status
- Without
Three-axis SOI capacitive accelerometer with PLL C-Vconverter
- Author
- Y.Matsumoto, M.Nishimura, M.Matsuura,M.Ishida
- Publication Title
- Magazine name Sensors and Actuators A Start Page 77-85 (Publication Date）1999/05）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (conference, symposium, etc.)
- Peer-review Status
- Without