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Researcher Database
Industrial property rights
Matsumoto, Yoshinori
1-1 items (total 1)
グレイスケールマスク作製法とそれを用いた３次元微細加工方法
Application date
：
2001-201852 2001.07
Rights type
：
Patent
Release date
：
2003－15275 2003.07
低コストでグレイスケールマスクを製作する手法と感光性ガラスを用いて３次元加工する手法を提案した。
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Matsumoto, YoshinoriMatsumoto, Yoshinori