Published papers
Nakano, Nobuhiko
61-77 items (total 77)
'Time resolved optical emission spectroscopy of an inductively coupled plasma in argon and oxygen'
- Author
- M.Tadokoro, H.Hirata, N.Nakano,Z.Lj.Petrovic, and T.Makabe
- Publication Title
- Magazine name Physical Review E Volume Vol.57(Issue No.1) Start Page 43 - End Page 46 (Publication Date）1998/01）
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- Joint Work
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- Research paper (scientific journal)
- Peer-review Status
- With
'Diagnostics of an Inductively Coupled Plasma in Oxygen'
- Author
- M.Tadokoro, A.Itoh, N.Nakano, Z.Lj.Petrovic, T.Makabe
- Publication Title
- Magazine name IEEE transactions on plasma science Volume Vol.26(Issue No.6) Start Page 1724 - End Page 1732 (Publication Date）1998/12）
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- Joint Work
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- Research paper (scientific journal)
- Peer-review Status
- With
'Two-dimensional transport of submicron particles in capacitively coupled plasma reactor'
- Author
- R.Hashido, M.Hasebe, Y.Hosokawa, N.Nakano, Y.Yamaguchi, and T.Makabe
- Publication Title
- Magazine name Japanese Journal of Applied Physics Volume Vol.36(Issue No.6A) Start Page 3707 - End Page 3713 (Publication Date）1997/06）
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- Joint Work
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- Research paper (scientific journal)
- Peer-review Status
- With
'Three dimensional optical emission tomography of an Inductively Coupled Plasma'
- Author
- A.Okigawa, M.Tadokoro, A.Itoh, N.Nakano, Z.Lj.Petrovic, and T.Makabe
- Publication Title
- Magazine name Japanese Journal of Applied Physics Volume Vol.36(Issue No.7B) Start Page 4605 - End Page 4616 (Publication Date）1997/07）
- Authorship Category
- Joint Work
- Peer-review Status
- With
'Electron transport to a substrate in a radio frequency capacitively coupled plasma by the Boltzmann equation'
- Author
- J.Matsui, M.Shibata, N.Nakano, and T.Makabe
- Publication Title
- Magazine name Journal of Vacuum Science and Technology A Volume Vol.16(Issue No.1) Start Page 294 - End Page 299 (Publication Date）1998/01）
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- Joint Work
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- Research paper (scientific journal)
- Peer-review Status
- With
'Phasespace modeling of a radiofrequency plasma interacting with surfaces'
- Author
- T.Makabe, J.Matsui, N.Nakano
- Publication Title
- Magazine name Pure and applied chemistry Volume Vol.70(Issue No.6) Start Page 1187 - End Page 1191 (Publication Date）1998/06）
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- Joint Work
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- Research paper (scientific journal)
- Peer-review Status
- With
'A novel sustaining mechanism in capacitively coupled radiofrequency plasma in Oxygen'
- Author
- M.Shibata, T.Makabe, and N.Nakano
- Publication Title
- Magazine name Japanese Journal of Applied Physics Volume Vol.37(Issue No.7) Start Page 4182 - End Page 4185 (Publication Date）1998/07）
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- Joint Work
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- Research paper (scientific journal)
- Peer-review Status
- With
'Effects of frequency on the two-dimensional structure of capacitively coupled plasma in Ar'
- Author
- T.Kitajima, Y.Takeo, N.Nakano, T.Makabe
- Publication Title
- Magazine name Journal of applied physics Volume Vol.84(Issue No.11) Start Page 5928 - End Page 5936 (Publication Date）1998/12）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With
'Two-dimensional density distribution of metastable atoms in an inductively coupled plasma in Ar'
- Author
- M. Tadokoro, H. Hirata, N. Nakano, Z. Lj. Petrovic, T.Makabe
- Publication Title
- Magazine name Physical Review E Volume vol.58(Issue No.6) Start Page 7823 - End Page 7830 (Publication Date）1998/12）
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- Joint Work
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- Research paper (scientific journal)
- Peer-review Status
- With
'Two-dimensional images of radiative and metastable excited state radial profiles for an inductively coupled plasma in argon'
- Author
- H. Hirata, M. Tadokoro, N. Nakano, Z. Lj. Petrovic, T. Makabe
- Publication Title
- Magazine name IEEE Transactionson Plasma Science Volume vol.27(Issue No.1) Start Page 50 - End Page 51 (Publication Date）1999/02）
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- Joint Work
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- Research paper (scientific journal)
- Peer-review Status
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'Two-dimensional self-consistent simulation of a DC magnetron discharge'
- Author
- E. Shidoji, H. Ohtake, N. Nakano, T. Makabe
- Publication Title
- Magazine name JapaneseJournalofAppliedPhysics,Part-1- Volume vol.38(Issue No.4A) Start Page 2131 - End Page 2136 (Publication Date）1999/04）
- Authorship Category
- Joint Work
- Publication Category
- Research paper (scientific journal)
- Peer-review Status
- With
'Two-dimensional modeling of spatiotemporal structure of inductively coupled plasma'
- Author
- K. Kamimura, K. Iyanagi; N. Nakano, T.Makabe
- Publication Title
- Magazine name Japanese Journal of Applied Physics, Part 1 Volume vol.38(Issue No.7B) Start Page 4429 - End Page 4435 (Publication Date）1999/07）
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- Joint Work
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- Research paper (scientific journal)
- Peer-review Status
- With
'Dependence of driving frequency on capacitively coupled plasma in CF4'
- Author
- S. Segawa, M. Kurihara, N. Nakano, T.Makabe
- Publication Title
- Magazine name Japanese Journal of Applied Physics, Part 1 Volume vol.38(Issue No.7B) Start Page 4416 - End Page 4422 (Publication Date）1999/07）
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- Joint Work
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- Research paper (scientific journal)
- Peer-review Status
- With
'Numerical simulation of the discharge in d.c. magnetron sputtering'
- Author
- E. Shidoji, N. Nakano, T. Makabe
- Publication Title
- Magazine name ThinSolidFilms. Volume vol.351(Issue No.1-2; 30) Start Page 37 - End Page 41 (Publication Date）1999/08）
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- Joint Work
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- Research paper (scientific journal)
- Peer-review Status
- With
The effect of topographical local charging on the etching of deep-submicron structures in SiO2 as a function of aspect ratio
- Author
- Matsui. J, Nakano N, Petrovic, Z, Makabe. T
- Publication Title
- Magazine name APPLIED PHYSICS LETTERS Volume 78(Issue 7) Start Page 883 - End Page 885 (Publication Date）2001/02）
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- Joint Work
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- Research paper (scientific journal)
- Peer-review Status
- With
'A computational investigation of the RF plasma structures and their production efficiency in the frequency range from HF to VHF'
- Author
- T. Kitamura, N.Nakano, T.Makabe, andY.Yamaguchi
- Publication Title
- Magazine name Plasma Sources Science and Technology Start Page 40 - End Page 45 (Publication Date）1993/02）
- Authorship Category
- Joint Work
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- Research paper (scientific journal)
- Peer-review Status
- With
'The Radical Transport in the Narrow-Gap-Reactive-Ion Etcher in SF6 by the Relaxation Continuum Model'
- Author
- N.Nakano, Z.Lj.Petrovic, and T.Makabe
- Publication Title
- Magazine name Japanese Journal of Applied Physics Volume Vol.33(Issue No.4B) Start Page 2223 - End Page 2230 (Publication Date）1994/04）
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- Joint Work
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- Research paper (scientific journal)
- Peer-review Status
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